Mark Kushner

2023

Distinguished University Professor

University of Michigan

2018

von Engel and Franklin Prize

ICPIG (International Conference on Phenomena in Ionized Gases)

2018

Stephen S. Attwood Award

College of Engineering

2017

Plasma Chemistry Award

IPCS (International Plasma Chemistry Society)

2016

Distinguished Lecturer

American Physical Society, Division of Plasma Physics

2016

Distinguished Professor

University of Technology, Eindhoven

2015

Charles K. Birdsall Award

IEEE-Nuclear & Plasma Sciences Society

2011

Medard W. Welch Award

AVS

2011

Fellow

IPCS (International Plasma Chemistry Society)

2011

Member of the National Academy of Engineering

NAE

2010

Will Allis Prize for the Study of Ionized Gases

APS

2009

George I. Haddad Professor of Electrical Engineering and Computer Science

College of Engineering

2008

University Researcher Award

Semiconductor Industry Association

2001

Distinguished Lecturer

American Physical Society, Division of Plasma Physics

2000

Plasma Science and Applications Award

IEEE

1999

Fellow

AVS

1999

Plasma Science and Technology Prize

AVS

1998, 1997

Anderson Consulting Award for Excellence in Advising

University of Illinois

1997

Tegal Corporation Thinker Award for Plasma Processing Technology

Tegal Corporation

1995

Technical Excellence Award

Semiconductor Research Corporation

1995

Fellow

Japanese Society for Advancement of Science

1991

Burlington Northern Faculty Achievement Award

University of Illinois

1991

T. Murphy University of Illinois Scholar

University of Illinois

1991

Xerox Senior Faculty Award

University of Illinois

1991

Fellow

IEEE

1990

Fellow

APS

1990

Everitt Award for Undergraduate Instruction

University of Illinois

1988

Xerox Junior Faculty Award

University of Illinois

–

Fellow

Institute of Physics

–

Fellow

Intl. Union Pure & Applied Chemistry

–

Fellow

OSA